S02700 - SEMI S27 - Safety Guideline for the Contents of Environmental, Safety, and Health (ESH) Evaluation Reports Revision:SEMI S27-0310 - Inactive EPT defines concepts

EPT defines concepts

This method provides a uniform procedure to determine the sealing capabilities of fluorocarbon resin fittings

SEMI M1-0611 (technical revision)

orgで入手可能となる。初版は2005年7月発行。

a fairly common need is for packaging that allows movement of some of the internal subcomponents of the device during operation

S02700 - SEMI S27 - Safety Guideline for the Contents of Environmental, Safety, and Health (ESH) Evaluation Reports Revision:SEMI S27-0310 - Inactive EPT defines conceptsThis Safety Guideline was technically approved by the Environmental Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 16, 2009. Available at www. semi. org in February 2010. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available